Sierra Instruments, Inc. Compod Programmable Flow Sensor Control Module Flow Transmitter

With its advanced mass flow sensor capabilities,the Compod™ control valve,combined with Sierra's SmartTrak® 100 mass flow meters (MFM's) or controllers (MFC's),greatly simplifies air flow control systems and allows the use of the open source MODBUS RTU protocol for multiple The instruments are connected to the network. Compod™ also monitors the functionality of the mass flow meter or controller,inc diagnostics,notifying the user of valve failure or system failure. By adding the COMOD™ Flow Sensor Control Valve to a new or existing SmartTrak® MFM or MFC,end users have complete control. Two digital outputs and one analog input are user-configurable for a variety of airflow process controls,inc:

characteristic

• Gas and blending
• batch control
• Sensor driven leak testing
• Process Monitoring
• Physical Vapor Deposition (Sputtering)
• pressure monitoring
• Gas proportion control
• Internal valve performance monitoring
• trigger alert
• Automatically start or stop gas flow under user-defined conditions
• Gas flow accumulation,pulse output adjustable
• there are more. . .
• Physical Vapor Deposition (Sputtering)