Sierra Instruments, Inc. Compod Programmable Flow Sensor Control Module Gas Flow Meter

characteristic

• Gas and blending
• batch control
• Sensor driven leak testing
• Process Monitoring
• Physical Vapor Deposition (Sputtering)
• Pressure monitoring and control
• Gas proportion control
• Internal valve performance monitoring
• trigger alert
• Automatically start or stop gas flow under user-defined conditions
• Gas flow accumulation,pulse output adjustable
• there are more. . .
• Physical Vapor Deposition (Sputtering)

With its advanced mass flow sensor capabilities,the Compod-u2122 control valve greatly simplifies air flow control systems when combined with the Sierra-u2019s-SmartTrak-u00ae-100 mass flow meter (MFM-u2019s) or controller (MFC-u2019s),and allows multiple instruments to be networked using the open source MODBUS-RTU protocol. Compod™ also monitors the functionality of the mass flow meter or controller,inc diagnostics,notifying the user of valve failure or system failure. By adding the Compod-U2122 Flow Sensor Control Valve to a new or existing SmartTrak-U00ae-MFM or MFC,end users have complete control. Two digital outputs and one analog input are user-configurable for a variety of airflow process controls,inc: