Dual bridge sensor CYG512 miniature, thin dynamic pressure sensor

describe

The CYG512 thin pressure sensor is specially designed for the pressure field distribution on the upper and lower surfaces of ultra-thin models in wind tunnels in aerodynamic research. It is an improved version of CYG511. It is especially suitable for working conditions where the radial size of the reduction mold is large and the thickness is very small. It is impossible or difficult to dig a hole and bury it, and can only be attached to the surface. The thickness of about 1mm reduces its impact on the flow field to a very small extent.

CYG512 uses the same advanced silicon-to-silicon direct bonding pressure-sensitive chip as CYG511, which has excellent static mechanical properties. Due to the precision designed and processed packaging structure, while reducing the total thickness to about 1mm, it also greatly reduces the volume of the packaging space of the sensitive element and sensor pressure housing, reducing the impact of the shallow tube cavity on the dynamic frequency response. to the minimum, so it has excellent dynamic characteristics.

The standard pressure range of CYG512 is 100, 160, 250, 400, 600, 1000, 1600, 2500 and 4000ka.

CYG512 has two dimensions, one is thin button shape, ф8 mm diameter, total thickness is 1.2 mm; one is thin strip shape, 6×10×1mm lead wires are 4mm wide, 0.15mm thick, 1m Long flexible leads. The thin buckle has a stainless steel structure, and the ultra-thin stainless steel film on the upper surface has uniformly distributed and spiral air inlet holes drilled and carved by laser. The thin strip type has no top cover and only covers the place where sensitive components are mounted with a very thin silicone protective film. Users can choose according to their own practical working conditions.

Performance index parameters

1. Accuracy level

2. Full-scale output: Minimum value 30mv Typical value 80mv Maximum value 130mv

3. Input and output impedance: minimum value 3 kΩ, typical value 5 kΩ, maximum value 7 kΩ

4. Input working current: 1.5 mA (gauge pressure type) 1mA (absolute pressure type) (constant current source)

5. Working temperature range: -55℃～+120℃

6. Compensation temperature range: -10℃～+80℃

7. Overload capacity: 200% of rated range

8. Acceleration sensitivity: <0.001%FS/g

Dimensional drawing