HORIBA Instruments, Inc. GR-300 Series Pressure Controller
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- Model ： GR-300 Series
- Category： Pressure Controller
- Brand ： HORIBA Instruments, Inc.
- Delivery Time： Request for a Quote for Further Details
- Manufacturer： HORIBA
Products
The GR-300 Series controls the gas used to cool the backside of a wafer held in place by an electrostatic chuck system.,the stability and accuracy of the GR-300 make it ideal for controlling helium and argon flow in silicon wafer cooling systems.,Application Example,In the example below,the GR-300 Series is controlling the gas used to cool the backside of a wafer held in place by an electrostatic chuck system.
Features
- Pressure control is more stable and precise
- Mass flow sensor (optional)
- Compatible with various accessories
- RoHS compliant Sex
Product Specifications
| Parameter | Value | Parameter | Value |
|---|---|---|---|
| Measuring the dielectric | Liquid | Appearance of the form | Stand-Alone |
| Standards and compliance | RoHS |
