Brooks Instrument Brooks PC115 & PC125 Pressure Controller

characteristic

• integral pressure sensor
• response time :<1 second
• wide flow measurement range,full size flow range from 0-3 sccm arrive 0–30000 sccm
• greatest pressure 500 psig
• All-metal seal flow path: 32µ inch Ra maximum surface finish
• coplanar valves provide lower leakage rates
• too much gas / multi-range capability allows storage and preprogramming of up to 10 gas calibration and ranging in a single device
• DeviceNet® and analog communication options
• larger coplanar valve control range reduces sensitivity to pressure changes in the process,ensures a more stable process
• full metal wetting channel,to remain particle free 、 process conditions for moisture and contamination
• the unit can also be configured as a mass flow controller,for calibration or testing purposes
• too much gas / multi-range capability reduces inventory
• the greater control range provided by coplanar valves reduces the number of parts required to control the process
• compact,space-saving footprint is easy to trace
• digital communications provide simple debugging and reduce system wiring
• Wide flow measurement range with full-scale flow rates from 0 - 3 sccm to 0 – 30,000 sccm
• too much gas / multi-range capability allows storage and preprogramming of up to 10 gas calibration and range

brooks model SLA7840 it is a high-purity metal sealing instrument,measure flow while controlling pressure . remote pressure sensor signal,together with adjustable integral PID control electronics and coplanar control valves,maintain desired set pressure . compared to other metal sealed controllers,coplanar valve reduces sensitivity to pressure changes,and provides a lower leakage rate,thus ensuring a more stable process