Conax Triple-Point Calibration TC for Barrel Reactors Thermocouple Temperature Probe

Conax offers complete OEM three-point calibrated thermocouples and special variants customized to individual factory needs. The triple point design is used in Applied Materials\/Moore Technologies 76XX,77XX and 78XX series epitaxial barrel reactors.,the triple point sensor allows calibration of 3 infrared (IR) sensors for monitoring receiver temperature during wafer processing. Since the sensor has 3 measuring connections,all 3 infrared sensors can be calibrated at once. This saves time and increases the repeatability of single-junction sensors because the triple point does not have to be repositioned to calibrate each infrared sensor. All units come with dual temperature calibration,usually at 1100C and 1200C or customer requested temperature. Unless otherwise designed by the customer,triple point sensors use Type C thermocouple wire and Inconel sheath material.,Conax also offers recommended annual inspection and recalibration services. The inspection includes X-rays to determine the condition inside the triple point sensor.