Thyracont VSM72 Vacuum Sensor

Absolute pressure 1000 mbar to 5 x 10-9 mbar (=hPa),750 Torr to 5 x 10-9 Torr,the compact VSM72 Pirani/cold cathode combination sensor measures absolute pressure from atmosphere to ultra-high vacuum. The intelligent,microprocessor-driven Smartline sensor automatically controls the appropriate interaction of the two vacuum sensors over the measuring range and switching points to achieve high accuracy.,advantages,typical applications

characteristic

• Wide range combination sensor
• Patented pulsed Pirani sensor with extended range,allowing cold cathodes to operate at lower pressures and extend life
• Robust cold cathode sensor,insensitive to air impact
• Logarithmic signal output 0-10V,RS485 interface
• Replaceable sensor head
• Excellent ignition behavior
• Correct pressure readings with individual gas type correction factors for pirani and cold cathode sensors
• Two independent dry relay switching points
• Analytical Instruments
• Coating equipment and vapor deposition
• mass spectrometry
• process engineering
• sputtering plants
• vacuum furnace
• Logarithmic signal output 0-10V,rs485 interface
• Sputtering equipment