Dual bridge sensor CYG502 miniature, thin dynamic pressure sensor

describe

The ultra-miniature pressure sensor CYG502 with a nominal outer diameter of 2mm is specially designed for applications requiring smaller installation size in fluid mechanics experiments. It is the smallest pressure sensor among the products currently launched by our company.

The pressure sensitive element of CYG502 is designed and manufactured using advanced MEMS (Miro Electronic Machinical Systems) technology. The three-dimensionally integrated, double-sided processed silicon piezoresistive pressure sensitive element has excellent linear accuracy. The high consistency of the Wheatstone strain bridge produced by ion implantation and fine photolithography enables it to have very small temperature drift. Silicon-to-silicon direct bonding technology and inverted V-groove design are used to optimize the size of the available chip film and reduce the entire chip size to 1×1mm, while the output sensitivity can still reach the 100kpa range, which is ultra- A key breakthrough was achieved in the realization of micro-sensors.

Changing the silicon-glass bonding in the traditional design to silicon-silicon bonding improves the thermal matching effect and reduces zero-position instability caused by stress.

At present, there are absolute pressure type measurement mode products on the market, and gauge pressure type is under development.

CYG502A absolute pressure ultra-miniature pressure sensor is probe-shaped, with a standard outer diameter of Ф2.15mm and a length of 18mm. The optional measuring range of the sensor is 100, 160, 250, 400, 600, 1000, 1600, 2500, 4000kpa absolute pressure. .

The front side of the sensitive element of the CYG502A absolute pressure sensor bears pressure. Therefore, it is only suitable for dry gases whose medium is non-corrosive and non-conductive. It has a very wide operating temperature range, up to -55℃~+120℃, and also has very excellent high-frequency dynamic characteristics. The natural frequency of its lowest range sensitive element is >200kHz, and the rise time is sub-microsecond.

Performance index parameters

1. Accuracy level

2. Full-scale output: Minimum value 30mv Typical value 80mv Maximum value 130mv

3. Input and output impedance: minimum value 3 kΩ, typical value 5 kΩ, maximum value 7 kΩ

4. Input working current: 1.5mA (gauge pressure type) 1mA (absolute pressure type) (constant current source)

5. Working temperature range: -55℃～+120℃

6. Compensation temperature range: -10℃～+80℃

7. Overload capacity: 200% of rated range

8. Acceleration sensitivity: <0.001%FS/g

Dimensions: CYG502A