Dual bridge sensor CYG503; CYG504 miniature, thin dynamic pressure sensor

describe

The micro pressure sensor CYG503 with a nominal outer diameter of 3mm is specially designed for dynamic pressure distribution measurement in aerodynamic research experiments that require small installation size, no disturbance to the flow field, and excellent dynamic response. It is used to measure aerodynamic performance such as engine inlet pressure distortion, surge, etc.

The pressure sensitive element of CYG503 is designed and manufactured using advanced MEMS (Miro Electronic Machinical Systems) technology. The three-dimensional integrated, double-sided processed silicon piezoresistive pressure sensitive element has excellent linear accuracy. The high consistency of the Wheatstone strain bridge produced by ion implantation and fine photolithography technology makes it have very small temperature drift and small volume. The silicon thin film force-sensitive structure formed by mechanical processing and precision anisotropic etching enables it to have high pressure sensitivity and radial scale as small as less than 1.5mm. The advanced miniaturized pressure-sensitive chip adopts stress-free packaging technology and is hermetically sealed in a special micro-mounting base and stainless steel capillary tube. The reference pressure chamber of the absolute pressure sensor is a sealed vacuum chamber on the back of the chip. The reference pressure chamber of the gauge pressure sensor is led from the back through a thinner stainless steel capillary tube to communicate with the atmosphere. In order to facilitate the user to obtain a stable pressure reference, a thin nylon tube is used to guide it to a stable air pressure location.

CYG503A absolute pressure micro pressure sensor is probe-shaped, with a standard outer diameter of Ф3.5mm and a length of 18mm. The special short cylindrical CYG503AS shortens the length to 12mm. The optional measuring ranges are 100, 160, 250, 400, 600, 1000, 1600, 2500 and 4000kpa absolute pressure.

CYG503G gauge pressure micro pressure sensor is probe-shaped, with a standard outer diameter of Ф3.5mm, a length of 18mm, and a back pressure extraction capillary length of 12mm. The optional measuring ranges are 160, 250, 400, 600, 1000, 1600 and 2500 kpa gauge pressure.

The design and production patent of CYG503 has been authorized by the national invention patent, and the patent number is: 200410103083.3.

CYG504 miniature bolt-mounted pressure sensor is a derivative of CYG503 for the convenience of some users. It can be used for both absolute pressure and gauge pressure. Its dimensions are shown in the attached picture.

CYG503 and 504 sensors use sensitive elements to bear pressure on the front, so they are only suitable for dry gases whose medium is non-corrosive and non-conductive. But it has a fairly wide operating temperature range and very good dynamic frequency response. Dynamic frequency responses as low as zero frequency and as high as tens of kilohertz can be used. Adding coating protection on the surface can improve the media applicability, but at the expense of frequency response characteristics.

Performance index parameters

1. Accuracy level

2. Full-scale output: Minimum value 30mv Typical value 80mv Maximum value 130mv

3. Input and output impedance: minimum value 3 kΩ, typical value 5 kΩ, maximum value 7 kΩ

4. Input working current: 1.5mA (gauge pressure type) 1mA (absolute pressure type) (constant current source)

5. Working temperature range: -55℃～+120℃

6. Compensation temperature range: -10℃～+80℃

7. Overload capacity: 200% of rated range

8. Acceleration sensitivity: <0.001%FS/g

Dimensional drawing